著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Advances in resist technology and processing and Tarascon-Auriol, R. G. and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California",,SPIE,1997,Proceedings,,0819424633,,https://cir.nii.ac.jp/crid/1130282271342155648