著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"European Conference on Mask Technology for Integrated Circuits and Microcomponents and Behringer, Uwe F. W. and VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik and Institut für Mikrostrukturtechnik and SEMI-Europe and Society of Photo-optical Instrumentation Engineers","EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany",,"SPIE,VDE Verlag GmbH",2005,Proceedings,,0819458309,,https://cir.nii.ac.jp/crid/1130282271343889152