著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Motamedi, M. Edward and Bailey, Wayne E. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and National Institute of Standards and Technology (U.S.)","Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas",,SPIE,1996,Proceedings,,0819422797,,https://cir.nii.ac.jp/crid/1130282271411630080