著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Cuthbert, John D. and Society of Photo-optical Instrumentation Engineers","Optical/laser microlithography : 3-5 March 1993, San Jose, California",,SPIE,1993,Proceedings,,0819411612,,https://cir.nii.ac.jp/crid/1130282271481774336