著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Routh, Donald E. and Society of Photo-optical Instrumentation Engineers and Northern California Microphotomask/Masking Working Group and National Aeronautics and Space Administration and International Society for Hybrid Microelectronics","Developments in semiconductor microlithography, June 1-3, 1976, San Jose, California",,Society of Photo-optical Instrumentation Engineers,1976,Proceedings of the Society of Photo-Optical Instrumentation Engineers,,0892521074,,https://cir.nii.ac.jp/crid/1130282271489119488