著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gossmann, Hans-Joachim L.","Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.",,Materials Research Society,1999,Materials Research Society symposium proceedings,,1558994750,,https://cir.nii.ac.jp/crid/1130282271535614336