著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Kittler, M. and Breitenstein, O.","Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998",,Scitec Publications Ltd.,1998,Diffusion and defect data : solid state data,,390845039X,,https://cir.nii.ac.jp/crid/1130282271572078464