著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Wasa, Kiyotaka and Hayakawa, Shigeru","Handbook of sputter deposition technology : principles, technology, and applications",,Noyes Publications,1992,Materials science and process technology series,,0815512805,,https://cir.nii.ac.jp/crid/1130282271636859264