著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kunz, Roderick R, and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California",,SPIE,1996,Proceedings,,0819421006,,https://cir.nii.ac.jp/crid/1130282271738134656