著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Schuegraf, Klaus K.","Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications",,Noyes Publications,1988,Materials science and process technology series,,0815511531,,https://cir.nii.ac.jp/crid/1130282271774042496