著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Blais, Phillip D. and Society of Photo-optical Instrumentation Engineers","Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1986,Proceedings,,089252667X,,https://cir.nii.ac.jp/crid/1130282271787989888