著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Cleaning Technology in Semiconductor Device Manufacturing and Rużyłło, Jerzy and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics and PhotonicsDivision",Cleaning Technology in Semiconductor Device Manufacturing IX,,Electrochemical Society,2005,ECS transactions,,1566774292,,https://cir.nii.ac.jp/crid/1130282271804674304