著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Arnold, William H. and Society of Photo-optical Instrumentation Engineers","Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California",,SPIE,1990,Proceedings,,0819403083,,https://cir.nii.ac.jp/crid/1130282271806218112