著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Mukherjee, Sayan D. and Society of Photo-optical Instrumentation Engineers and Metallurgical Society (U.S.)","Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida",,SPIE,1987,Proceedings,,089252832X,,https://cir.nii.ac.jp/crid/1130282271846512768