著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Mountziaris, Triantafillos John and United States. Army Research Office and United States. Office of Naval Research","Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.",,Materials Research Society,1994,Materials Research Society symposium proceedings,,1558992332,,https://cir.nii.ac.jp/crid/1130282271846971904