著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Feldman, Martin",Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems,,Woodhead Pub.,2014,Woodhead Publishing series in electronic and optical materials,,9780857095008,,https://cir.nii.ac.jp/crid/1130282271939196032