著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Data Analysis and Modeling for Process Control (Conference) and Emami, Iraj and Tobin, Kenneth W. and International SEMATECH","Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA",,SPIE,2006,Proceedings,,9780819461988,,https://cir.nii.ac.jp/crid/1130282271966466560