著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Plasma Processing and Mathad, G. S. and Allendorf, Mark Donald and Sah, R. E. and Yang, M. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division",Plasma processing XIV : proceedings of the international symposium,,Electrochemical Society,2002,Proceedings,,1566773415,,https://cir.nii.ac.jp/crid/1130282271993243520