著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Resnick, Douglas J. and Society of Photo-optical Instrumentation Engineers","Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies IX : 7-8 March 1990, San Jose, California",,SPIE,1990,Proceedings,,0819403105,,https://cir.nii.ac.jp/crid/1130282272110747904