著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gad-el-Hak, Mohamed",MEMS : design and fabrication,,"CRC, Taylor & Francis",2006,Mechanical engineering series,,0849391385,,https://cir.nii.ac.jp/crid/1130282272234723712