著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Nemanich, R. J. (Robert J.)","Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.",,Materials Research Society,1992,Materials Research Society symposium proceedings,,1558991549,,https://cir.nii.ac.jp/crid/1130282272350655360