著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th : 1998 : Munich-Unterhaching, Germany) and Behringer, Uwe and VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik and Forschungszentrum Karlsruhe. Institute for Microstructure Technology and SEMI-Europe and BACUS (Technical Group) and Society of Photo-optical Instrumentation Engineers","15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany",,SPIE,1999,Proceedings,,0819431397,,https://cir.nii.ac.jp/crid/1130282272358179840