著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"González Ruiz, Pilar and Meyer, Kristin De and Witvrouw, Ann",Poly-SiGe for MEMS-above-CMOS Sensors,,Springer,2014,Advanced microelectronics,,9789400767980,,https://cir.nii.ac.jp/crid/1130282272421450624