著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Symposium on Plasma Processing and Mathad, G. S. and Schwartz, G. C. and Gottscho, R. A. and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. Electronics Division",Proceedings of the Sixth Symposium on Plasma Processing,,Electrochemical Society,1987,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282272430924928