著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Agarwal, Aditya","Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.",,Materials Research Society,2001,Materials Research Society symposium proceedings,,1558995188,,https://cir.nii.ac.jp/crid/1130282272434745344