著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Pirri, Anthony N. and Piwczyk, Bernhard P. and Society of Photo-optical Instrumentation Engineers","Excimer beam applications, 6 September 1988, Boston, Massachusetts",,SPIE--International Society for Optical Engineering,1988,Proceedings,,0819400335,,https://cir.nii.ac.jp/crid/1130282272452878848