著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Electrochemical Society. Meeting and Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films and Sah, R. Ekwal","Silicon nitride, silicon dioxide, and emerging dielectrics 9",,Electrochemical Society,2007,ECS transactions,,9781566775526,,https://cir.nii.ac.jp/crid/1130282272487441152