著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Cleaning Technology in Semiconductor Device Manufacturing and Rużyłło, Jerzy and Novak, Richard E. and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectrics and Insulation Division","Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing",,Electrochemical Society,1990,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282272516332672