著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Yoshihara, Hideo and Society of Photo-optical Instrumentation Engineers. Japan Chapter and BACUS (Technical group) and Photomask Japan '94","Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan",,SPIE,1994,Proceedings,,0819415634,,https://cir.nii.ac.jp/crid/1130282272521608320