著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Suzuki, Kazuaki and Smith, Bruce W.",Microlithography : science and technology,2nd ed.,"CRC Press, Taylor & Francis Group",2007,Optical science and engineering,,9780824790240,,https://cir.nii.ac.jp/crid/1130282272557418752