著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Vasquez, Barbara and Society of Photo-optical Instrumentation Engineers","Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California",,SPIE,1993,Proceedings,,0819410004,,https://cir.nii.ac.jp/crid/1130282272585424384