著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Electrochemical Society. Meeting and International Symposium on Microstructures and Microfabricated Systems and Hesketh, P. J. and Electrochemical Society. Sensor Division and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectric Science and Technology Division",Proceedings of the Symposium on Microstructures and Microfabricated Systems,,The Electrochemical Society,1994,Proceedings,,1566770467,,https://cir.nii.ac.jp/crid/1130282272622821504