著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Courtois, B. (Bernard) and Society of Photo-optical Instrumentation Engineers","Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France",,SPIE,1999,Proceedings,,"0819431540,0819431540",,https://cir.nii.ac.jp/crid/1130282272653852416