著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Multilevel Metallization, Interconnection, and Contact Technologies and Electrochemical Society. Meeting and Rothman, L. B. and Herndon, T. and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. Electronics Division","Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies",,"Electrochemical Society, Inc.",1987,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282272699486080