著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Blais, Phillip D. and International Society for Hybrid Microelectronics","Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV : March 14-15, 1985, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1985,Proceedings,,089252572X,,https://cir.nii.ac.jp/crid/1130282272731864320