著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kumar, Ashok and Higgs, C. Fred, III and Korach, Chad S. and Balakumar, Subramanian and Materials Research Society. Spring Meeting","Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A.",,Materials Research Society,2010,Materials Research Society symposium proceedings,,9781605111308,,https://cir.nii.ac.jp/crid/1130282272842564992