著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"DelRio, Frank W. and Materials Research Society. Meeting and Microelectromechanical systems--Materials and Devices","Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.",,"Materials Research Society,Cambridge University Press",2011,Materials Research Society symposium proceedings,,9781605112763,,https://cir.nii.ac.jp/crid/1130282272886527360