著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Luft, Werner and Tsuo, Y. Simon",Hydrogenated amorphous silicon alloy deposition processes,,M. Dekker,1993,Applied physics,,0824791460,,https://cir.nii.ac.jp/crid/1130282272968825088