著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Vengallatore, Srikar and Bagdahn, Jörg and Sheppard, Norman F., Jr. and Spearing, S. Mark and Materials Research Society. Meeting","Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.",,Materials Research Society,2009,Materials Research Society symposium proceedings,,9781605111117,,https://cir.nii.ac.jp/crid/1130282272987290752