著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Pierson, Hugh O.","Handbook of chemical vapor deposition (CVD) : principles, technology, and applications",,Noyes Publications,1992,Materials science and process technology series,,0815513003,,https://cir.nii.ac.jp/crid/1130282273086335488