著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films and Kapoor, Vikram J. and Hankins, Kevin T. and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. Electronics Division",Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films,,Electrochemical Society),1987,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282273125013120