著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on High Purity Silicon and Claeys, C. L. and Electrochemical Society. Electronics Division and Society of Photo-optical Instrumentation Engineers and Electrochemical Society. Meeting",High Purity Silicon VI : proceedings of the sixth International Symposium,,"Published in cooperation with SPIE-the International Society for Optical Engineering,Electrochemical Society, c2000",2000,Proceedings,,1566772842,,https://cir.nii.ac.jp/crid/1130282273133826304