著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Popov, Oleg A.","High density plasma sources : design, physics and performance",,Noyes Publications,1995,Materials science and process technology series,,0815513771,,https://cir.nii.ac.jp/crid/1130282273348283904