Author,Title,Edition,Publisher,Year,Series,Number,ISBN,ISSN,URL
"Williams, Michael E. and Baldwin, David G. and Manz, Paul C.","Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics",,Noyes Publications,1995,Materials science and process technology series,,0815513690,,https://cir.nii.ac.jp/crid/1130282273350468480