著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Einspruch, Norman G. and Cohen, Simon S. and Gildenblat, Gennady Sh.",VLSI metallization,,Academic Press,1987,VLSI electronics : microstructure science,,0122341155,,https://cir.nii.ac.jp/crid/1130282273372593152