著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL Alissa M. Fitzgerald and Carolyn D. White and Charles C. Chung,MEMS product development : from concept to commercialization,,"Springer, c2021",2021,Microsystems and nanosystems,,9783030617080,,https://cir.nii.ac.jp/crid/1130290942801834663