著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Babu, Suryadevara",Advances in chemical mechanical planarization (CMP),2nd ed,Woodhead Pub. is an imprint of Elsevier,2022,Woodhead Publishing series in electronic and optical materials,,9780128217917,,https://cir.nii.ac.jp/crid/1130572001036334251