著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Tilli, Markku and Paulasto-Kröckel, Mervi and Petzold, Matthias and Theuss, Horst and 本岡, 輝昭 and Lindroos, Veikko",Handbook of silicon based MEMS materials and technologies,3rd ed,Elsevier,2020,Micro and nano technologies series,,9780128177860,,https://cir.nii.ac.jp/crid/1131130857712537856