{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1360003446841453440.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1143/jjap.31.4433"}},{"identifier":{"@type":"URI","@value":"https://iopscience.iop.org/article/10.1143/JJAP.31.4433"}},{"identifier":{"@type":"URI","@value":"https://iopscience.iop.org/article/10.1143/JJAP.31.4433/pdf"}},{"identifier":{"@type":"NAID","@value":"210000032546"}}],"dc:title":[{"@value":"Spatial Controllability of Periodic Ripple Structures Generated in Laser Etching of n-GaAs"}],"description":[{"type":"abstract","notation":[{"@value":"<jats:p> \n   Spatial controllability of periodic ripple structures was investigated in laser etching of n-GaAs. For single-beam etching and holographic etching with high ratios of average spacing of holographic grating to average spacing of ripple structures (Λ<jats:sub>h</jats:sub>/Λ<jats:sub>h</jats:sub>), ripple structures were observed. In particular, in <jats:italic>p</jats:italic>-polarization, spatial fluctuation was greater than that in <jats:italic>s</jats:italic>-polarization. This might occur because phase distortion cannot be eliminated by <jats:italic>p</jats:italic>-polarization beam irradiation. For holographic etching with small Λ<jats:sub>h</jats:sub>/Λ<jats:sub>r</jats:sub> ratios, ripple structures were changed into grating structures because these grating structures might be generated in phase with holographic gratings. \n </jats:p>"}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1420282801181424128","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"00211889"},{"@type":"NRID","@value":"1000000211889"},{"@type":"NRID","@value":"9000004897331"},{"@type":"NRID","@value":"9000415234312"},{"@type":"NRID","@value":"9000020414813"},{"@type":"NRID","@value":"9000254159739"},{"@type":"NRID","@value":"9000001699888"},{"@type":"NRID","@value":"9000022042154"},{"@type":"NRID","@value":"9000252926201"},{"@type":"NRID","@value":"9000001249223"},{"@type":"NRID","@value":"9000392715980"},{"@type":"NRID","@value":"9000005262201"},{"@type":"NRID","@value":"9000003681562"},{"@type":"NRID","@value":"9000401724586"},{"@type":"NRID","@value":"9000392737749"},{"@type":"NRID","@value":"9000252767098"},{"@type":"NRID","@value":"9000401630145"},{"@type":"NRID","@value":"9000401623503"},{"@type":"NRID","@value":"9000256502785"},{"@type":"NRID","@value":"9000283610324"},{"@type":"NRID","@value":"9000392699266"},{"@type":"NRID","@value":"9000347113409"},{"@type":"NRID","@value":"9000254159933"},{"@type":"NRID","@value":"9000392727786"},{"@type":"NRID","@value":"9000401632870"},{"@type":"NRID","@value":"9000401654957"},{"@type":"NRID","@value":"9000415220811"},{"@type":"NRID","@value":"9000415161805"},{"@type":"NRID","@value":"9000401633183"},{"@type":"NRID","@value":"9000252761804"},{"@type":"NRID","@value":"9000392717157"},{"@type":"NRID","@value":"9000401644995"},{"@type":"NRID","@value":"9000022053255"},{"@type":"NRID","@value":"9000401614901"},{"@type":"NRID","@value":"9000401652493"},{"@type":"NRID","@value":"9000283609621"},{"@type":"NRID","@value":"9000252766179"},{"@type":"NRID","@value":"9000252976503"},{"@type":"NRID","@value":"9000009131622"},{"@type":"NRID","@value":"9000107352477"},{"@type":"NRID","@value":"9000392724059"},{"@type":"NRID","@value":"9000401678111"},{"@type":"NRID","@value":"9000401987380"},{"@type":"NRID","@value":"9000403148814"},{"@type":"NRID","@value":"9000257969538"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/jjew4869"}],"foaf:name":[{"@value":"Hiroshi 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