著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Jinxing Liang and Fusao Kohsaka and Takahiro Matsuo and Xuefeng Li and Ken Kunitomo and Toshitsugu Ueda,Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2009-06-01,48,6S,06FK10,https://cir.nii.ac.jp/crid/1360003446854821504,https://doi.org/10.1143/jjap.48.06fk10